JPH0220828Y2 - - Google Patents

Info

Publication number
JPH0220828Y2
JPH0220828Y2 JP1986072663U JP7266386U JPH0220828Y2 JP H0220828 Y2 JPH0220828 Y2 JP H0220828Y2 JP 1986072663 U JP1986072663 U JP 1986072663U JP 7266386 U JP7266386 U JP 7266386U JP H0220828 Y2 JPH0220828 Y2 JP H0220828Y2
Authority
JP
Japan
Prior art keywords
cap
annular recess
core tube
fitting structure
tapered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986072663U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62184735U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986072663U priority Critical patent/JPH0220828Y2/ja
Publication of JPS62184735U publication Critical patent/JPS62184735U/ja
Application granted granted Critical
Publication of JPH0220828Y2 publication Critical patent/JPH0220828Y2/ja
Expired legal-status Critical Current

Links

JP1986072663U 1986-05-16 1986-05-16 Expired JPH0220828Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986072663U JPH0220828Y2 (enEXAMPLES) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986072663U JPH0220828Y2 (enEXAMPLES) 1986-05-16 1986-05-16

Publications (2)

Publication Number Publication Date
JPS62184735U JPS62184735U (enEXAMPLES) 1987-11-24
JPH0220828Y2 true JPH0220828Y2 (enEXAMPLES) 1990-06-06

Family

ID=30916311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986072663U Expired JPH0220828Y2 (enEXAMPLES) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPH0220828Y2 (enEXAMPLES)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2601830B2 (ja) * 1987-07-28 1997-04-16 株式会社東芝 熱処理装置
JP2620698B2 (ja) * 1987-12-18 1997-06-18 東京エレクトロン株式会社 熱処理装置
US7559557B2 (en) * 2007-08-22 2009-07-14 Varian Semiconductor Equipment Associates, Inc. Sealing between vacuum chambers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3023819A1 (de) * 1980-06-25 1982-01-21 Agfa-Gevaert Ag, 5090 Leverkusen Filmkassette fuer einen lichtempfindlichen filmstreifen

Also Published As

Publication number Publication date
JPS62184735U (enEXAMPLES) 1987-11-24

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