JPH0220332U - - Google Patents
Info
- Publication number
- JPH0220332U JPH0220332U JP9815088U JP9815088U JPH0220332U JP H0220332 U JPH0220332 U JP H0220332U JP 9815088 U JP9815088 U JP 9815088U JP 9815088 U JP9815088 U JP 9815088U JP H0220332 U JPH0220332 U JP H0220332U
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- transport arm
- holder
- mount stage
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815088U JPH0220332U (cs) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815088U JPH0220332U (cs) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220332U true JPH0220332U (cs) | 1990-02-09 |
Family
ID=31324156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9815088U Pending JPH0220332U (cs) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220332U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006319281A (ja) * | 2005-05-16 | 2006-11-24 | Sony Corp | アーム駆動機構及び実装装置、並びに、アーム駆動方法及び実装方法 |
-
1988
- 1988-07-25 JP JP9815088U patent/JPH0220332U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006319281A (ja) * | 2005-05-16 | 2006-11-24 | Sony Corp | アーム駆動機構及び実装装置、並びに、アーム駆動方法及び実装方法 |
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