JPH02196098A - Production of superconducting film - Google Patents

Production of superconducting film

Info

Publication number
JPH02196098A
JPH02196098A JP1190789A JP1190789A JPH02196098A JP H02196098 A JPH02196098 A JP H02196098A JP 1190789 A JP1190789 A JP 1190789A JP 1190789 A JP1190789 A JP 1190789A JP H02196098 A JPH02196098 A JP H02196098A
Authority
JP
Japan
Prior art keywords
temp
high
oxygen
superconductor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1190789A
Inventor
Masahiro Shirasaki
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1190789A priority Critical patent/JPH02196098A/en
Publication of JPH02196098A publication Critical patent/JPH02196098A/en
Application status is Pending legal-status Critical

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment or power systems integrating superconducting elements or equipment
    • Y02E40/64Superconducting transmission lines or power lines or cables or installations thereof
    • Y02E40/641Superconducting transmission lines or power lines or cables or installations thereof characterised by their form
    • Y02E40/642Films or wires on bases or cores

Abstract

PURPOSE: To prevent lack of high-temp. superconductivity due to laser beam irradiation by irradiating the thin film of an oxide superconductor by a laser beam, and simultaneously blowing a high-temp. gas contg. oxygen against the film.
CONSTITUTION: An MgO wafer 3 on which the thin film of a Y-based oxide high-temp. superconductor is to be deposited, for example, is reciprocated in the X direction at a high speed, and placed on an auxiliary heating stage 4 which is intermittently moved only in the Y direction a minute distance at a time. A laser beam 1 is focused by a convex lens 2,a nd made incident to the surface of a thin oxide high-temp. superconductor film on the wafer 2. The thin film is linearly annealed as the auxiliary heating stage 4 moves, or melted and recrystallized. The tip of an oxygen inlet pipe is positioned very close to the part of the wafer 3 where the beam 1 is made incident, and hence high-temp. oxygen is blown against the part. Since the oxide high-temp. superconductor absorbs oxygen at 400-600°C, the oxygen lost at a high temp. when melted can be replenished, and superconductivity can be exhibited.
COPYRIGHT: (C)1990,JPO&Japio
JP1190789A 1989-01-23 1989-01-23 Production of superconducting film Pending JPH02196098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1190789A JPH02196098A (en) 1989-01-23 1989-01-23 Production of superconducting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1190789A JPH02196098A (en) 1989-01-23 1989-01-23 Production of superconducting film

Publications (1)

Publication Number Publication Date
JPH02196098A true JPH02196098A (en) 1990-08-02

Family

ID=11790795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1190789A Pending JPH02196098A (en) 1989-01-23 1989-01-23 Production of superconducting film

Country Status (1)

Country Link
JP (1) JPH02196098A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005039281A (en) * 2004-07-20 2005-02-10 Seiko Epson Corp Method and equipment for manufacturing ceramics, and semiconductor device and piezoelectric element
US7271042B2 (en) * 1996-12-12 2007-09-18 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7271042B2 (en) * 1996-12-12 2007-09-18 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
US7351646B2 (en) * 1996-12-12 2008-04-01 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
US7687380B2 (en) 1996-12-12 2010-03-30 Semiconductor Energy Laboratory Co., Ltd. Laser annealing method and laser annealing device
JP2005039281A (en) * 2004-07-20 2005-02-10 Seiko Epson Corp Method and equipment for manufacturing ceramics, and semiconductor device and piezoelectric element
JP4557144B2 (en) * 2004-07-20 2010-10-06 セイコーエプソン株式会社 The method of manufacturing a ceramic

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