JPH0219146U - - Google Patents

Info

Publication number
JPH0219146U
JPH0219146U JP9721688U JP9721688U JPH0219146U JP H0219146 U JPH0219146 U JP H0219146U JP 9721688 U JP9721688 U JP 9721688U JP 9721688 U JP9721688 U JP 9721688U JP H0219146 U JPH0219146 U JP H0219146U
Authority
JP
Japan
Prior art keywords
support frame
protective film
photomask
protection device
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9721688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9721688U priority Critical patent/JPH0219146U/ja
Publication of JPH0219146U publication Critical patent/JPH0219146U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP9721688U 1988-07-22 1988-07-22 Pending JPH0219146U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9721688U JPH0219146U (US07922777-20110412-C00004.png) 1988-07-22 1988-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9721688U JPH0219146U (US07922777-20110412-C00004.png) 1988-07-22 1988-07-22

Publications (1)

Publication Number Publication Date
JPH0219146U true JPH0219146U (US07922777-20110412-C00004.png) 1990-02-08

Family

ID=31322493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9721688U Pending JPH0219146U (US07922777-20110412-C00004.png) 1988-07-22 1988-07-22

Country Status (1)

Country Link
JP (1) JPH0219146U (US07922777-20110412-C00004.png)

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