JPH02161302A - Shape measuring instrument - Google Patents

Shape measuring instrument

Info

Publication number
JPH02161302A
JPH02161302A JP31374388A JP31374388A JPH02161302A JP H02161302 A JPH02161302 A JP H02161302A JP 31374388 A JP31374388 A JP 31374388A JP 31374388 A JP31374388 A JP 31374388A JP H02161302 A JPH02161302 A JP H02161302A
Authority
JP
Japan
Prior art keywords
light
psd
measured
slit
photodetecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31374388A
Other languages
Japanese (ja)
Inventor
Masahiro Isoda
Akihiko Nakamura
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juki Corp filed Critical Juki Corp
Priority to JP31374388A priority Critical patent/JPH02161302A/en
Publication of JPH02161302A publication Critical patent/JPH02161302A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enhance the measuring accuracy, and also, to execute the measurement at a high speed by forming a photodetecting sensor by placing in parallel plural one-dimensional semiconductor position detectors of thin width in the width direction, and allowing them to photodetect reflected light beams from an object along its width direction.
CONSTITUTION: Plural one-dimensional semiconductor position detectors (PSD) 8a of thin width are placed in parallel and provided as a photodetecting sensor, a slit or plural spot light beams are used as a light source, and outputs are fetched from an electrode A(IA1-IAn) and an electrode B(IB1-IBn) of both ends of each PSD 8a. A light beam from a light source 1 becomes a light light by a lens Z and a slit plate 19 and projected onto an object to be measured 3, and a reflected light of the slit light on the object to be measured 3 is allowed to form an image on the photodetecting surface of the PSD 8a through a photodetecting lens 4. Subsequently, a surface shape of the object 3 to be measured can be measured from a position displacement of the slit light which is brought to image formation on the PSD 8a.
COPYRIGHT: (C)1990,JPO&Japio
JP31374388A 1988-12-14 1988-12-14 Shape measuring instrument Pending JPH02161302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31374388A JPH02161302A (en) 1988-12-14 1988-12-14 Shape measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31374388A JPH02161302A (en) 1988-12-14 1988-12-14 Shape measuring instrument

Publications (1)

Publication Number Publication Date
JPH02161302A true JPH02161302A (en) 1990-06-21

Family

ID=18044995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31374388A Pending JPH02161302A (en) 1988-12-14 1988-12-14 Shape measuring instrument

Country Status (1)

Country Link
JP (1) JPH02161302A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567195A (en) * 1991-09-05 1993-03-19 Matsushita Electric Ind Co Ltd Shape measuring instrument
JPH0567197A (en) * 1991-09-05 1993-03-19 Matsushita Electric Ind Co Ltd Shape measuring instrument
JP2004037274A (en) * 2002-07-03 2004-02-05 Sumitomo Osaka Cement Co Ltd Height measuring apparatus and monitoring device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044810A (en) * 1983-08-22 1985-03-11 Matsushita Electric Ind Co Ltd Device for detecting position of spot light

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044810A (en) * 1983-08-22 1985-03-11 Matsushita Electric Ind Co Ltd Device for detecting position of spot light

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567195A (en) * 1991-09-05 1993-03-19 Matsushita Electric Ind Co Ltd Shape measuring instrument
JPH0567197A (en) * 1991-09-05 1993-03-19 Matsushita Electric Ind Co Ltd Shape measuring instrument
JP2004037274A (en) * 2002-07-03 2004-02-05 Sumitomo Osaka Cement Co Ltd Height measuring apparatus and monitoring device

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