JPH0214796U - - Google Patents

Info

Publication number
JPH0214796U
JPH0214796U JP9370988U JP9370988U JPH0214796U JP H0214796 U JPH0214796 U JP H0214796U JP 9370988 U JP9370988 U JP 9370988U JP 9370988 U JP9370988 U JP 9370988U JP H0214796 U JPH0214796 U JP H0214796U
Authority
JP
Japan
Prior art keywords
heater
semiconductor manufacturing
manufacturing equipment
vertical
element holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9370988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9370988U priority Critical patent/JPH0214796U/ja
Publication of JPH0214796U publication Critical patent/JPH0214796U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP9370988U 1988-07-15 1988-07-15 Pending JPH0214796U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9370988U JPH0214796U (US06623731-20030923-C00012.png) 1988-07-15 1988-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9370988U JPH0214796U (US06623731-20030923-C00012.png) 1988-07-15 1988-07-15

Publications (1)

Publication Number Publication Date
JPH0214796U true JPH0214796U (US06623731-20030923-C00012.png) 1990-01-30

Family

ID=31318179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9370988U Pending JPH0214796U (US06623731-20030923-C00012.png) 1988-07-15 1988-07-15

Country Status (1)

Country Link
JP (1) JPH0214796U (US06623731-20030923-C00012.png)

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