JPH02147179A - Resistance trimming device - Google Patents

Abstract

PURPOSE:To continuously carry out resistance trimming by one resistance trimming device by providing a loader part and an unloader to change the proceeding direction of a base plate, an inversion part to invert the base plate and automatically changeable probe cards. CONSTITUTION:The base plate 8 carried-in by the loader part 11 is set on an X-Y table 9 and resistance trimming is carried out while measuring the surface resistance of the base plate 8 by a probe card 10a for the base plate surface. The base plate 8 is carried-out from the X-Y table 9 to the loader part 11 and further, to a base plate inverting machine. The base plate 8 is inverted here and again set on the X-Y table 9 from the loader part 11. Resistance trimming is carried out while measuring the rear resistance of the base plate 8 by a probe card 10b for the base plate rear automatically changed-over and the base plate 8 is carried-out to the unloader part 12. Even if both surfaces of the base plate 8 have resistances, trimming is carried out continuously by the one device by setting the two probe cards.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a resistor trimming device.

(Prior Art) A conventional resistance trimming device has a configuration as shown in FIG.

That is, the board 1 is transferred from the loader section 2 to the X-Y table 3.
The probe card 4 carries out laser trimming while measuring the resistance value at the substrate 1].
It is carried out to the unloader section 5.

(Problem to be Solved by the Invention) However, in the conventional configuration as described above, if there are resistors on both sides of the substrate 1, at least two
There was a problem in that a separate resistance trimming device was required.

The reason is that in FIG. 4, in order to trim the resistance on the front surface 1a of the board, a corresponding probe card 4a is required, and in order to trim the resistance on the back surface 1b of the board, a corresponding probe card 4a is required. 4b
Is required. Therefore, in order to trim the resistors on both sides of the board, the first resistor trimming device is required.
The 18 resistors on the front surface of the substrate were trimmed by a, the substrate was then inverted by the substrate inverter 7, and the resistors on the back surface 1b of the substrate were trimmed by the second resistor trimming device 6b.

Therefore, the present invention enables continuous trimming with one device even if there is resistance on both sides of the substrate.

(Means for Solving Problem A) The means of the present invention for solving the above problem includes a loader section and an unloader section on which a substrate can be placed and the direction of conveyance of the substrate can be changed, and an X-Y table on which the substrate is placed. The present invention is provided with a section, an inversion section for inverting the front and back surfaces of the substrate, and a probe section in which at least two probe cards for resistor trimming can be set and both probe cards can be automatically switched to each other.

(for production) The effect of the above means is as follows.

That is, as in the conventional case, a substrate is transferred from a loader section onto an XY table, and the resistance is trimmed while measuring the resistance on the surface of the substrate using the first probe card. After trimming is completed, the substrate is transported to the substrate reversing section by the loader section or unloader section.
After being reversed, it is conveyed onto the X-Y table again. and,
Trim the resistance while measuring the resistance on the back side of the board with the automatically switched second probe card.

As a result, even if there is resistance on both sides of the substrate, trimming can be performed continuously using only one device.

(Example) Hereinafter, an example of the present invention will be described based on the accompanying drawings. In FIG. 1, 8 is a board with resistance on both the front and back sides, 9 is an X-Y table, 10a is a probe card for the front side of the board, and t6'b is a probe card for the back side of the board. Reference numerals 11 and 12 are a loader section and an unloader section that can change the direction of movement of the substrate.

The operation of the resistor trimming device configured as above will be explained below with reference to FIG. 2.

FIG. 2 shows a planar layout of the resistor trimming device. After the board 8 carried by the loader section 11 from the right side is set on the X-Y table 9, the resistance is first trimmed while measuring the resistance of the surface of the board 8 using the board surface probe card 10a. Next, after the trimming is completed, the substrate 8 is transported from the X-Y table 9 to the loader section 11 and then to the substrate reversing machine 13.

The board 8 is now turned over and is again removed from the loader section 11
It is set on the Y table 9. Thereafter, the resistance is trimmed while measuring the resistance on the back side of the board 8 using the automatically switched probe card 10b for the back side of the board, and after completion, the board 8 is carried out to the unloader section 12.

As described above, according to this embodiment, a loader section and an unloader section that can change the direction of movement of the substrate;
By providing an X-Y table section, a reversing section for reversing the front and back sides of the board, at least two probe cards can be set, and a probe section that can automatically switch, it can be used even if there is resistance on both sides of the board. , trimming can be performed continuously with one device.

In the embodiment, the substrate reversing machine 13 was treated as a separate device from the resistor trimming device 14, but the trimming device r111
Although the substrate reversing machine 13 is laid out before the loader section 11, it may be laid out after the unloader section 12.

(Effects of the Invention) As described above, the present invention includes a loader section and an unloader section that can change the traveling direction of the substrate, an x-y table section, an inversion section that inverts the front and back surfaces of the substrate, and a probe. By being able to set at least two cards and having a probe section that can be automatically switched, one device can perform continuous trimming even if there is resistance on both sides of the board.

[BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is a configuration diagram of a resistance trimming device main body in an embodiment of the present invention, Fig. 2 is a layout diagram of a resistance trimming device in an embodiment, and Fig. 3 is a diagram of a conventional resistance trimming device main body. The configuration diagram, FIG. 4, is a layout diagram of a conventional resistor trimming device. 8... Board, 9... X-Y table, 10a
...Probe card for the front side of the board, 10b...Probe card for the back side of the board. 11... Rotor part, 12... Unloader part, 13... Board reversing machine.

Claims (1)

[Claims] A loader section and an unloader section on which a substrate can be placed and the conveyance direction of the substrate can be changed; an X-Y table section on which the substrate is placed; and an inversion section that inverts the front and back surfaces of the substrate.
A resistor trimming device characterized by being equipped with a probe section that can set at least two probe cards for resistor trimming and that can automatically switch between the two probe cards.