JPH02146445U - - Google Patents

Info

Publication number
JPH02146445U
JPH02146445U JP5594389U JP5594389U JPH02146445U JP H02146445 U JPH02146445 U JP H02146445U JP 5594389 U JP5594389 U JP 5594389U JP 5594389 U JP5594389 U JP 5594389U JP H02146445 U JPH02146445 U JP H02146445U
Authority
JP
Japan
Prior art keywords
wafer cassette
chuck mechanism
horizontal rods
chucked
constituted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5594389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5594389U priority Critical patent/JPH02146445U/ja
Publication of JPH02146445U publication Critical patent/JPH02146445U/ja
Pending legal-status Critical Current

Links

JP5594389U 1989-05-16 1989-05-16 Pending JPH02146445U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5594389U JPH02146445U (US06272168-20010807-M00014.png) 1989-05-16 1989-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5594389U JPH02146445U (US06272168-20010807-M00014.png) 1989-05-16 1989-05-16

Publications (1)

Publication Number Publication Date
JPH02146445U true JPH02146445U (US06272168-20010807-M00014.png) 1990-12-12

Family

ID=31579338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5594389U Pending JPH02146445U (US06272168-20010807-M00014.png) 1989-05-16 1989-05-16

Country Status (1)

Country Link
JP (1) JPH02146445U (US06272168-20010807-M00014.png)

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