JPH02144719U - - Google Patents

Info

Publication number
JPH02144719U
JPH02144719U JP5244589U JP5244589U JPH02144719U JP H02144719 U JPH02144719 U JP H02144719U JP 5244589 U JP5244589 U JP 5244589U JP 5244589 U JP5244589 U JP 5244589U JP H02144719 U JPH02144719 U JP H02144719U
Authority
JP
Japan
Prior art keywords
gratings
detection device
displacement detection
optical displacement
transparent substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5244589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648339Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989052445U priority Critical patent/JPH0648339Y2/ja
Publication of JPH02144719U publication Critical patent/JPH02144719U/ja
Application granted granted Critical
Publication of JPH0648339Y2 publication Critical patent/JPH0648339Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1989052445U 1989-05-08 1989-05-08 光学式変位検出装置 Expired - Lifetime JPH0648339Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989052445U JPH0648339Y2 (ja) 1989-05-08 1989-05-08 光学式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989052445U JPH0648339Y2 (ja) 1989-05-08 1989-05-08 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPH02144719U true JPH02144719U (US20100170793A1-20100708-C00006.png) 1990-12-07
JPH0648339Y2 JPH0648339Y2 (ja) 1994-12-12

Family

ID=31572754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989052445U Expired - Lifetime JPH0648339Y2 (ja) 1989-05-08 1989-05-08 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPH0648339Y2 (US20100170793A1-20100708-C00006.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194124A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531882A (en) * 1978-08-25 1980-03-06 Commissariat Energie Atomique Hydrophobic substrate and its manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531882A (en) * 1978-08-25 1980-03-06 Commissariat Energie Atomique Hydrophobic substrate and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194124A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置

Also Published As

Publication number Publication date
JPH0648339Y2 (ja) 1994-12-12

Similar Documents

Publication Publication Date Title
JPH02144719U (US20100170793A1-20100708-C00006.png)
JPH03109205U (US20100170793A1-20100708-C00006.png)
JPH01133752U (US20100170793A1-20100708-C00006.png)
JPS6179314U (US20100170793A1-20100708-C00006.png)
JPS6185801U (US20100170793A1-20100708-C00006.png)
JPS6390204U (US20100170793A1-20100708-C00006.png)
JPH038453U (US20100170793A1-20100708-C00006.png)
JPH02128985U (US20100170793A1-20100708-C00006.png)
JPS61144425U (US20100170793A1-20100708-C00006.png)
JPS629122U (US20100170793A1-20100708-C00006.png)
JPH02133808U (US20100170793A1-20100708-C00006.png)
JPS6291213U (US20100170793A1-20100708-C00006.png)
JPS62143988U (US20100170793A1-20100708-C00006.png)
JPH0218219U (US20100170793A1-20100708-C00006.png)
JPH02150729U (US20100170793A1-20100708-C00006.png)
JPS6354056U (US20100170793A1-20100708-C00006.png)
JPH0314420U (US20100170793A1-20100708-C00006.png)
JPH03100975U (US20100170793A1-20100708-C00006.png)
JPH0365181U (US20100170793A1-20100708-C00006.png)
JPH0174583U (US20100170793A1-20100708-C00006.png)
JPH0353068U (US20100170793A1-20100708-C00006.png)
JPS61160426U (US20100170793A1-20100708-C00006.png)
JPH0392601U (US20100170793A1-20100708-C00006.png)
JPH0192687U (US20100170793A1-20100708-C00006.png)
JPS6454336U (US20100170793A1-20100708-C00006.png)