JPH02144343U - - Google Patents

Info

Publication number

JPH02144343U

JPH02144343U JP5429989U JP5429989U JPH02144343U JP H02144343 U JPH02144343 U JP H02144343U JP 5429989 U JP5429989 U JP 5429989U JP 5429989 U JP5429989 U JP 5429989U JP H02144343 U JPH02144343 U JP H02144343U

Authority

JP

Japan

Prior art keywords

clean

supply unit

air supply

clean air

room

Prior art date

1989-05-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000012423 maintenance Methods 0.000 claims description 7
• 239000000463 material Substances 0.000 claims description 4
• 238000005192 partition Methods 0.000 claims description 4
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims 2
• 238000000638 solvent extraction Methods 0.000 claims 1
• 238000012986 modification Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1