JPH0214357U - - Google Patents

Info

Publication number

JPH0214357U

JPH0214357U JP9120988U JP9120988U JPH0214357U JP H0214357 U JPH0214357 U JP H0214357U JP 9120988 U JP9120988 U JP 9120988U JP 9120988 U JP9120988 U JP 9120988U JP H0214357 U JPH0214357 U JP H0214357U

Authority

JP

Japan

Prior art keywords

vacuum chamber

modeled

registration request

model registration

utility

Prior art date

1988-07-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000015572 biosynthetic process Effects 0.000 claims description 2
• 238000001883 metal evaporation Methods 0.000 claims description 2
• 230000008020 evaporation Effects 0.000 claims 1
• 238000001704 evaporation Methods 0.000 claims 1
• 239000010408 film Substances 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2

Cited By (2)