JPH02142669U - - Google Patents

Info

Publication number

JPH02142669U

JPH02142669U JP4968189U JP4968189U JPH02142669U JP H02142669 U JPH02142669 U JP H02142669U JP 4968189 U JP4968189 U JP 4968189U JP 4968189 U JP4968189 U JP 4968189U JP H02142669 U JPH02142669 U JP H02142669U

Authority

JP

Japan

Prior art keywords

chamber

supply

defoaming device

recovery chamber

container

Prior art date

1989-04-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 4
• 238000011084 recovery Methods 0.000 claims description 3
• 238000000926 separation method Methods 0.000 claims description 3
• 238000005192 partition Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 2