JPH02142531U - - Google Patents
Info
- Publication number
- JPH02142531U JPH02142531U JP5066689U JP5066689U JPH02142531U JP H02142531 U JPH02142531 U JP H02142531U JP 5066689 U JP5066689 U JP 5066689U JP 5066689 U JP5066689 U JP 5066689U JP H02142531 U JPH02142531 U JP H02142531U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- liquid
- semiconductor wafer
- processing equipment
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5066689U JPH02142531U (cs) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5066689U JPH02142531U (cs) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142531U true JPH02142531U (cs) | 1990-12-04 |
Family
ID=31569410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5066689U Pending JPH02142531U (cs) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142531U (cs) |
-
1989
- 1989-04-28 JP JP5066689U patent/JPH02142531U/ja active Pending
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