JPH02142469U - - Google Patents
Info
- Publication number
- JPH02142469U JPH02142469U JP5140189U JP5140189U JPH02142469U JP H02142469 U JPH02142469 U JP H02142469U JP 5140189 U JP5140189 U JP 5140189U JP 5140189 U JP5140189 U JP 5140189U JP H02142469 U JPH02142469 U JP H02142469U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- melt
- single crystal
- vapor pressure
- always used
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims 3
- 230000005611 electricity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000003708 ampul Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5140189U JPH02142469U (enrdf_load_stackoverflow) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5140189U JPH02142469U (enrdf_load_stackoverflow) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142469U true JPH02142469U (enrdf_load_stackoverflow) | 1990-12-03 |
Family
ID=31570814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5140189U Pending JPH02142469U (enrdf_load_stackoverflow) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142469U (enrdf_load_stackoverflow) |
-
1989
- 1989-04-28 JP JP5140189U patent/JPH02142469U/ja active Pending
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