JPH02142463U - - Google Patents

Info

Publication number

JPH02142463U

JPH02142463U JP5069689U JP5069689U JPH02142463U JP H02142463 U JPH02142463 U JP H02142463U JP 5069689 U JP5069689 U JP 5069689U JP 5069689 U JP5069689 U JP 5069689U JP H02142463 U JPH02142463 U JP H02142463U

Authority

JP

Japan

Prior art keywords

crucible

vapor deposition

sintered pellet

side wall

internal space

Prior art date

1989-04-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007740 vapor deposition Methods 0.000 claims description 8
• 239000008188 pellet Substances 0.000 claims description 5
• 239000000463 material Substances 0.000 claims 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
• 229910052802 copper Inorganic materials 0.000 description 3
• 239000010949 copper Substances 0.000 description 3
• 238000010894 electron beam technology Methods 0.000 description 1
• 238000003780 insertion Methods 0.000 description 1
• 230000037431 insertion Effects 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000012986 modification Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1