JPH02140864U - - Google Patents

Info

Publication number

JPH02140864U

JPH02140864U JP4911989U JP4911989U JPH02140864U JP H02140864 U JPH02140864 U JP H02140864U JP 4911989 U JP4911989 U JP 4911989U JP 4911989 U JP4911989 U JP 4911989U JP H02140864 U JPH02140864 U JP H02140864U

Authority

JP

Japan

Prior art keywords

submount material

view

photodiode

plan

sectional

Prior art date

1989-04-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000463 material Substances 0.000 claims description 5
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 238000012544 monitoring process Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
• 239000010931 gold Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 229910052697 platinum Inorganic materials 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1
• 239000010936 titanium Substances 0.000 description 1