JPH02140838U - - Google Patents

Info

Publication number

JPH02140838U

JPH02140838U JP4828289U JP4828289U JPH02140838U JP H02140838 U JPH02140838 U JP H02140838U JP 4828289 U JP4828289 U JP 4828289U JP 4828289 U JP4828289 U JP 4828289U JP H02140838 U JPH02140838 U JP H02140838U

Authority

JP

Japan

Prior art keywords

view

semiconductor substrate

back surface

sectional

grooves

Prior art date

1989-04-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
• 229910052710 silicon Inorganic materials 0.000 description 4
• 239000010703 silicon Substances 0.000 description 4

Cited By (2)