JPH02136330U - - Google Patents

Info

Publication number
JPH02136330U
JPH02136330U JP4492589U JP4492589U JPH02136330U JP H02136330 U JPH02136330 U JP H02136330U JP 4492589 U JP4492589 U JP 4492589U JP 4492589 U JP4492589 U JP 4492589U JP H02136330 U JPH02136330 U JP H02136330U
Authority
JP
Japan
Prior art keywords
cassette storage
cassette
sealing material
pod
contacts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4492589U
Other languages
English (en)
Japanese (ja)
Other versions
JP2509914Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4492589U priority Critical patent/JP2509914Y2/ja
Publication of JPH02136330U publication Critical patent/JPH02136330U/ja
Application granted granted Critical
Publication of JP2509914Y2 publication Critical patent/JP2509914Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP4492589U 1989-04-17 1989-04-17 カセット収納ポッド Expired - Fee Related JP2509914Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4492589U JP2509914Y2 (ja) 1989-04-17 1989-04-17 カセット収納ポッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4492589U JP2509914Y2 (ja) 1989-04-17 1989-04-17 カセット収納ポッド

Publications (2)

Publication Number Publication Date
JPH02136330U true JPH02136330U (US08124317-20120228-C00060.png) 1990-11-14
JP2509914Y2 JP2509914Y2 (ja) 1996-09-04

Family

ID=31558657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4492589U Expired - Fee Related JP2509914Y2 (ja) 1989-04-17 1989-04-17 カセット収納ポッド

Country Status (1)

Country Link
JP (1) JP2509914Y2 (US08124317-20120228-C00060.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311536A (ja) * 2006-05-18 2007-11-29 Covalent Materials Corp 半導体装置の製造方法、半導体基板の製造方法および半導体基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311536A (ja) * 2006-05-18 2007-11-29 Covalent Materials Corp 半導体装置の製造方法、半導体基板の製造方法および半導体基板

Also Published As

Publication number Publication date
JP2509914Y2 (ja) 1996-09-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees