JPH02134371U - - Google Patents

Info

Publication number
JPH02134371U
JPH02134371U JP4269389U JP4269389U JPH02134371U JP H02134371 U JPH02134371 U JP H02134371U JP 4269389 U JP4269389 U JP 4269389U JP 4269389 U JP4269389 U JP 4269389U JP H02134371 U JPH02134371 U JP H02134371U
Authority
JP
Japan
Prior art keywords
flow rate
gas passing
valve element
passage
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4269389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4269389U priority Critical patent/JPH02134371U/ja
Publication of JPH02134371U publication Critical patent/JPH02134371U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP4269389U 1989-04-11 1989-04-11 Pending JPH02134371U (US20090177143A1-20090709-C00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4269389U JPH02134371U (US20090177143A1-20090709-C00008.png) 1989-04-11 1989-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4269389U JPH02134371U (US20090177143A1-20090709-C00008.png) 1989-04-11 1989-04-11

Publications (1)

Publication Number Publication Date
JPH02134371U true JPH02134371U (US20090177143A1-20090709-C00008.png) 1990-11-07

Family

ID=31554458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4269389U Pending JPH02134371U (US20090177143A1-20090709-C00008.png) 1989-04-11 1989-04-11

Country Status (1)

Country Link
JP (1) JPH02134371U (US20090177143A1-20090709-C00008.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108130A (ja) * 1999-05-25 2001-04-20 Applied Materials Inc 半導体ウェーハ処理装置用クラスタバルブ
KR100941632B1 (ko) * 2009-07-20 2010-02-11 주식회사 동산세라믹 일체형 미세 유량조절밸브

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125136B2 (US20090177143A1-20090709-C00008.png) * 1971-09-20 1976-07-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125136B2 (US20090177143A1-20090709-C00008.png) * 1971-09-20 1976-07-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001108130A (ja) * 1999-05-25 2001-04-20 Applied Materials Inc 半導体ウェーハ処理装置用クラスタバルブ
KR100941632B1 (ko) * 2009-07-20 2010-02-11 주식회사 동산세라믹 일체형 미세 유량조절밸브

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