JPH02133427U - - Google Patents

Info

Publication number
JPH02133427U
JPH02133427U JP4229689U JP4229689U JPH02133427U JP H02133427 U JPH02133427 U JP H02133427U JP 4229689 U JP4229689 U JP 4229689U JP 4229689 U JP4229689 U JP 4229689U JP H02133427 U JPH02133427 U JP H02133427U
Authority
JP
Japan
Prior art keywords
vacuum
lid
vacuum container
vacuum device
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4229689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4229689U priority Critical patent/JPH02133427U/ja
Publication of JPH02133427U publication Critical patent/JPH02133427U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4229689U 1989-04-10 1989-04-10 Pending JPH02133427U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4229689U JPH02133427U (US20100056889A1-20100304-C00004.png) 1989-04-10 1989-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4229689U JPH02133427U (US20100056889A1-20100304-C00004.png) 1989-04-10 1989-04-10

Publications (1)

Publication Number Publication Date
JPH02133427U true JPH02133427U (US20100056889A1-20100304-C00004.png) 1990-11-06

Family

ID=31553717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4229689U Pending JPH02133427U (US20100056889A1-20100304-C00004.png) 1989-04-10 1989-04-10

Country Status (1)

Country Link
JP (1) JPH02133427U (US20100056889A1-20100304-C00004.png)

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