JPH02132942U - - Google Patents

Info

Publication number

JPH02132942U

JPH02132942U JP4257689U JP4257689U JPH02132942U JP H02132942 U JPH02132942 U JP H02132942U JP 4257689 U JP4257689 U JP 4257689U JP 4257689 U JP4257689 U JP 4257689U JP H02132942 U JPH02132942 U JP H02132942U

Authority

JP

Japan

Prior art keywords

wafer

carrier

drying

pedestal

jig

Prior art date

1989-04-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001035 drying Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 4
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
• 235000012431 wafers Nutrition 0.000 claims 7
• 238000004140 cleaning Methods 0.000 claims 2
• 239000007788 liquid Substances 0.000 claims 1

Cited By (1)