JPH02132050U - - Google Patents

Info

Publication number
JPH02132050U
JPH02132050U JP4175189U JP4175189U JPH02132050U JP H02132050 U JPH02132050 U JP H02132050U JP 4175189 U JP4175189 U JP 4175189U JP 4175189 U JP4175189 U JP 4175189U JP H02132050 U JPH02132050 U JP H02132050U
Authority
JP
Japan
Prior art keywords
wafer
vacuum suction
plate
plates
guide body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4175189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4175189U priority Critical patent/JPH02132050U/ja
Publication of JPH02132050U publication Critical patent/JPH02132050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
  • Discharge By Other Means (AREA)
JP4175189U 1989-04-10 1989-04-10 Pending JPH02132050U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4175189U JPH02132050U (US07413550-20080819-C00001.png) 1989-04-10 1989-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4175189U JPH02132050U (US07413550-20080819-C00001.png) 1989-04-10 1989-04-10

Publications (1)

Publication Number Publication Date
JPH02132050U true JPH02132050U (US07413550-20080819-C00001.png) 1990-11-02

Family

ID=31552689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4175189U Pending JPH02132050U (US07413550-20080819-C00001.png) 1989-04-10 1989-04-10

Country Status (1)

Country Link
JP (1) JPH02132050U (US07413550-20080819-C00001.png)

Similar Documents

Publication Publication Date Title
JPH02132050U (US07413550-20080819-C00001.png)
JPH01173940U (US07413550-20080819-C00001.png)
JPH0341728U (US07413550-20080819-C00001.png)
JPH02114937U (US07413550-20080819-C00001.png)
JPS6268552U (US07413550-20080819-C00001.png)
JPS6247133U (US07413550-20080819-C00001.png)
JPS6247125U (US07413550-20080819-C00001.png)
JPH0249127U (US07413550-20080819-C00001.png)
JPH03100229U (US07413550-20080819-C00001.png)
JPH0279036U (US07413550-20080819-C00001.png)
JPS63153529U (US07413550-20080819-C00001.png)
JPS63144953U (US07413550-20080819-C00001.png)
JPH0359635U (US07413550-20080819-C00001.png)
JPS6242242U (US07413550-20080819-C00001.png)
JPS6252929U (US07413550-20080819-C00001.png)
JPS6219740U (US07413550-20080819-C00001.png)
JPH0193736U (US07413550-20080819-C00001.png)
JPH0373450U (US07413550-20080819-C00001.png)
JPH02116231U (US07413550-20080819-C00001.png)
JPH0371623U (US07413550-20080819-C00001.png)
JPH0536836U (ja) ウエハー搬送治具
JPS63119582U (US07413550-20080819-C00001.png)
JPS63183121U (US07413550-20080819-C00001.png)
JPH0352071U (US07413550-20080819-C00001.png)
JPS6395240U (US07413550-20080819-C00001.png)