JPH02131254U - - Google Patents

Info

Publication number

JPH02131254U

JPH02131254U JP4114189U JP4114189U JPH02131254U JP H02131254 U JPH02131254 U JP H02131254U JP 4114189 U JP4114189 U JP 4114189U JP 4114189 U JP4114189 U JP 4114189U JP H02131254 U JPH02131254 U JP H02131254U

Authority

JP

Japan

Prior art keywords

pattern

aluminum

graphite

hole pattern

hole

Prior art date

1989-04-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 229910052782 aluminium Inorganic materials 0.000 claims description 14
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
• 229910002804 graphite Inorganic materials 0.000 claims description 7
• 239000010439 graphite Substances 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 2
• OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 229910052751 metal Inorganic materials 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000005361 soda-lime glass Substances 0.000 claims 1
• 239000000126 substance Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 239000011521 glass Substances 0.000 description 1