JPH02131245U - - Google Patents

Info

Publication number
JPH02131245U
JPH02131245U JP4083789U JP4083789U JPH02131245U JP H02131245 U JPH02131245 U JP H02131245U JP 4083789 U JP4083789 U JP 4083789U JP 4083789 U JP4083789 U JP 4083789U JP H02131245 U JPH02131245 U JP H02131245U
Authority
JP
Japan
Prior art keywords
gas introduction
oven
gas
pdp
exhaust device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4083789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4083789U priority Critical patent/JPH02131245U/ja
Publication of JPH02131245U publication Critical patent/JPH02131245U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gas-Filled Discharge Tubes (AREA)
JP4083789U 1989-04-06 1989-04-06 Pending JPH02131245U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4083789U JPH02131245U (US20030199744A1-20031023-C00003.png) 1989-04-06 1989-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4083789U JPH02131245U (US20030199744A1-20031023-C00003.png) 1989-04-06 1989-04-06

Publications (1)

Publication Number Publication Date
JPH02131245U true JPH02131245U (US20030199744A1-20031023-C00003.png) 1990-10-31

Family

ID=31550974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4083789U Pending JPH02131245U (US20030199744A1-20031023-C00003.png) 1989-04-06 1989-04-06

Country Status (1)

Country Link
JP (1) JPH02131245U (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003031117A (ja) * 2001-07-10 2003-01-31 Nec Corp 誘電体層の製造方法及び製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003031117A (ja) * 2001-07-10 2003-01-31 Nec Corp 誘電体層の製造方法及び製造装置

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