JPH02120851U - - Google Patents

Info

Publication number

JPH02120851U

JPH02120851U JP2964589U JP2964589U JPH02120851U JP H02120851 U JPH02120851 U JP H02120851U JP 2964589 U JP2964589 U JP 2964589U JP 2964589 U JP2964589 U JP 2964589U JP H02120851 U JPH02120851 U JP H02120851U

Authority

JP

Japan

Prior art keywords

recess

strain

generating portion

pressure

differential pressure

Prior art date

1989-03-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000000034 method Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 1