JPH02120641U - - Google Patents

Info

Publication number

JPH02120641U

JPH02120641U JP3056489U JP3056489U JPH02120641U JP H02120641 U JPH02120641 U JP H02120641U JP 3056489 U JP3056489 U JP 3056489U JP 3056489 U JP3056489 U JP 3056489U JP H02120641 U JPH02120641 U JP H02120641U

Authority

JP

Japan

Prior art keywords

opening

closing door

clean room

pores

separated

Prior art date

1989-03-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005192 partition Methods 0.000 claims description 4
• 239000011148 porous material Substances 0.000 claims description 3
• 230000003749 cleanliness Effects 0.000 claims 1
• 238000007599 discharging Methods 0.000 claims 1
• 239000000428 dust Substances 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000002347 injection Methods 0.000 description 1
• 239000007924 injection Substances 0.000 description 1
• 238000011045 prefiltration Methods 0.000 description 1

Cited By (1)