JPH02118925U - - Google Patents

Info

Publication number
JPH02118925U
JPH02118925U JP2863489U JP2863489U JPH02118925U JP H02118925 U JPH02118925 U JP H02118925U JP 2863489 U JP2863489 U JP 2863489U JP 2863489 U JP2863489 U JP 2863489U JP H02118925 U JPH02118925 U JP H02118925U
Authority
JP
Japan
Prior art keywords
photomask
sized rectangular
resist
rectangular substrate
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2863489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2863489U priority Critical patent/JPH02118925U/ja
Publication of JPH02118925U publication Critical patent/JPH02118925U/ja
Pending legal-status Critical Current

Links

JP2863489U 1989-03-14 1989-03-14 Pending JPH02118925U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2863489U JPH02118925U (US06650917-20031118-M00005.png) 1989-03-14 1989-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2863489U JPH02118925U (US06650917-20031118-M00005.png) 1989-03-14 1989-03-14

Publications (1)

Publication Number Publication Date
JPH02118925U true JPH02118925U (US06650917-20031118-M00005.png) 1990-09-25

Family

ID=31252164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2863489U Pending JPH02118925U (US06650917-20031118-M00005.png) 1989-03-14 1989-03-14

Country Status (1)

Country Link
JP (1) JPH02118925U (US06650917-20031118-M00005.png)

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