JPH02117888U - - Google Patents
Info
- Publication number
- JPH02117888U JPH02117888U JP2515189U JP2515189U JPH02117888U JP H02117888 U JPH02117888 U JP H02117888U JP 2515189 U JP2515189 U JP 2515189U JP 2515189 U JP2515189 U JP 2515189U JP H02117888 U JPH02117888 U JP H02117888U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- substrate
- claws
- hole
- conveying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515189U JPH02117888U (fr) | 1989-03-07 | 1989-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515189U JPH02117888U (fr) | 1989-03-07 | 1989-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02117888U true JPH02117888U (fr) | 1990-09-20 |
Family
ID=31245634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2515189U Pending JPH02117888U (fr) | 1989-03-07 | 1989-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02117888U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006090683A1 (fr) * | 2005-02-24 | 2006-08-31 | Yuyama Mfg. Co., Ltd. | Dispositif de transport de fioles et bras |
-
1989
- 1989-03-07 JP JP2515189U patent/JPH02117888U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006090683A1 (fr) * | 2005-02-24 | 2006-08-31 | Yuyama Mfg. Co., Ltd. | Dispositif de transport de fioles et bras |