JPH02117546U - - Google Patents

Info

Publication number

JPH02117546U

JPH02117546U JP2690789U JP2690789U JPH02117546U JP H02117546 U JPH02117546 U JP H02117546U JP 2690789 U JP2690789 U JP 2690789U JP 2690789 U JP2690789 U JP 2690789U JP H02117546 U JPH02117546 U JP H02117546U

Authority

JP

Japan

Prior art keywords

showing

glass mask

wafer

view

horizontally

Prior art date

1989-03-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004519 manufacturing process Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000011521 glass Substances 0.000 description 5
• 238000000034 method Methods 0.000 description 1
• 238000000206 photolithography Methods 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1