JPH02115868U - - Google Patents

Info

Publication number
JPH02115868U
JPH02115868U JP2413589U JP2413589U JPH02115868U JP H02115868 U JPH02115868 U JP H02115868U JP 2413589 U JP2413589 U JP 2413589U JP 2413589 U JP2413589 U JP 2413589U JP H02115868 U JPH02115868 U JP H02115868U
Authority
JP
Japan
Prior art keywords
vacuum chamber
guide
door
hole provided
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2413589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2413589U priority Critical patent/JPH02115868U/ja
Publication of JPH02115868U publication Critical patent/JPH02115868U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2413589U 1989-03-02 1989-03-02 Pending JPH02115868U (US20020051482A1-20020502-M00057.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2413589U JPH02115868U (US20020051482A1-20020502-M00057.png) 1989-03-02 1989-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2413589U JPH02115868U (US20020051482A1-20020502-M00057.png) 1989-03-02 1989-03-02

Publications (1)

Publication Number Publication Date
JPH02115868U true JPH02115868U (US20020051482A1-20020502-M00057.png) 1990-09-17

Family

ID=31243723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2413589U Pending JPH02115868U (US20020051482A1-20020502-M00057.png) 1989-03-02 1989-03-02

Country Status (1)

Country Link
JP (1) JPH02115868U (US20020051482A1-20020502-M00057.png)

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