JPH02115558U - - Google Patents

Info

Publication number

JPH02115558U

JPH02115558U JP2318289U JP2318289U JPH02115558U JP H02115558 U JPH02115558 U JP H02115558U JP 2318289 U JP2318289 U JP 2318289U JP 2318289 U JP2318289 U JP 2318289U JP H02115558 U JPH02115558 U JP H02115558U

Authority

JP

Japan

Prior art keywords

liquid nitrogen

receiving tank

gas

supply valve

trap

Prior art date

1989-02-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
• 239000007788 liquid Substances 0.000 claims description 16
• 229910052757 nitrogen Inorganic materials 0.000 claims description 16
• 239000007789 gas Substances 0.000 claims description 7
• 238000002347 injection Methods 0.000 claims description 2
• 239000007924 injection Substances 0.000 claims description 2
• 238000004544 sputter deposition Methods 0.000 claims 1
• 238000007738 vacuum evaporation Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3