JPH02113314U - - Google Patents

Info

Publication number

JPH02113314U

JPH02113314U JP2097289U JP2097289U JPH02113314U JP H02113314 U JPH02113314 U JP H02113314U JP 2097289 U JP2097289 U JP 2097289U JP 2097289 U JP2097289 U JP 2097289U JP H02113314 U JPH02113314 U JP H02113314U

Authority

JP

Japan

Prior art keywords

coil

ferromagnetic material

base film

resist material

rotary transformer

Prior art date

1989-02-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000003302 ferromagnetic material Substances 0.000 claims description 4
• 239000000463 material Substances 0.000 claims description 3
• 238000007747 plating Methods 0.000 claims description 2
• 238000005530 etching Methods 0.000 claims 1
• 238000004544 sputter deposition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 1