JPH02112020U - - Google Patents

Info

Publication number

JPH02112020U

JPH02112020U JP2091989U JP2091989U JPH02112020U JP H02112020 U JPH02112020 U JP H02112020U JP 2091989 U JP2091989 U JP 2091989U JP 2091989 U JP2091989 U JP 2091989U JP H02112020 U JPH02112020 U JP H02112020U

Authority

JP

Japan

Prior art keywords

openings

plate supports

pair

substrate

periphery

Prior art date

1989-02-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000013078 crystal Substances 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 4
• 239000000853 adhesive Substances 0.000 claims 1
• 230000001070 adhesive effect Effects 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1