JPH0211156U - - Google Patents

Info

Publication number

JPH0211156U

JPH0211156U JP8766588U JP8766588U JPH0211156U JP H0211156 U JPH0211156 U JP H0211156U JP 8766588 U JP8766588 U JP 8766588U JP 8766588 U JP8766588 U JP 8766588U JP H0211156 U JPH0211156 U JP H0211156U

Authority

JP

Japan

Prior art keywords

hearth

recess

evaporation source

hearth liner

liner

Prior art date

1988-06-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 6
• 238000001704 evaporation Methods 0.000 claims description 6
• 238000007740 vapor deposition Methods 0.000 claims 2