JPH02110804U - - Google Patents

Info

Publication number
JPH02110804U
JPH02110804U JP1880989U JP1880989U JPH02110804U JP H02110804 U JPH02110804 U JP H02110804U JP 1880989 U JP1880989 U JP 1880989U JP 1880989 U JP1880989 U JP 1880989U JP H02110804 U JPH02110804 U JP H02110804U
Authority
JP
Japan
Prior art keywords
array element
measured
light spot
light
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1880989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0642163Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1880989U priority Critical patent/JPH0642163Y2/ja
Publication of JPH02110804U publication Critical patent/JPH02110804U/ja
Application granted granted Critical
Publication of JPH0642163Y2 publication Critical patent/JPH0642163Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1880989U 1989-02-20 1989-02-20 光学式形状測定装置 Expired - Lifetime JPH0642163Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1880989U JPH0642163Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1880989U JPH0642163Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Publications (2)

Publication Number Publication Date
JPH02110804U true JPH02110804U (US20020128544A1-20020912-P00008.png) 1990-09-05
JPH0642163Y2 JPH0642163Y2 (ja) 1994-11-02

Family

ID=31233780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1880989U Expired - Lifetime JPH0642163Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Country Status (1)

Country Link
JP (1) JPH0642163Y2 (US20020128544A1-20020912-P00008.png)

Also Published As

Publication number Publication date
JPH0642163Y2 (ja) 1994-11-02

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