JPH02108340U - - Google Patents

Info

Publication number

JPH02108340U

JPH02108340U JP1675389U JP1675389U JPH02108340U JP H02108340 U JPH02108340 U JP H02108340U JP 1675389 U JP1675389 U JP 1675389U JP 1675389 U JP1675389 U JP 1675389U JP H02108340 U JPH02108340 U JP H02108340U

Authority

JP

Japan

Prior art keywords

wafer mounting

refrigerant

disk body

refrigerant passages

refrigerant passage

Prior art date

1989-02-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000003507 refrigerant Substances 0.000 claims description 11
• 238000001816 cooling Methods 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 238000012856 packing Methods 0.000 description 2