JPH02102728U - - Google Patents

Info

Publication number

JPH02102728U

JPH02102728U JP1161389U JP1161389U JPH02102728U JP H02102728 U JPH02102728 U JP H02102728U JP 1161389 U JP1161389 U JP 1161389U JP 1161389 U JP1161389 U JP 1161389U JP H02102728 U JPH02102728 U JP H02102728U

Authority

JP

Japan

Prior art keywords

phase growth

vapor phase

vapor

raw material

growth chamber

Prior art date

1989-02-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 12
• 239000002994 raw material Substances 0.000 claims description 5
• 238000005192 partition Methods 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
• 229910052753 mercury Inorganic materials 0.000 claims 1
• 239000012159 carrier gas Substances 0.000 description 2
• 239000007789 gas Substances 0.000 description 1