JPH02102727U - - Google Patents

Info

Publication number
JPH02102727U
JPH02102727U JP1090189U JP1090189U JPH02102727U JP H02102727 U JPH02102727 U JP H02102727U JP 1090189 U JP1090189 U JP 1090189U JP 1090189 U JP1090189 U JP 1090189U JP H02102727 U JPH02102727 U JP H02102727U
Authority
JP
Japan
Prior art keywords
oxide film
wiring layer
metal wiring
semiconductor device
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1090189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1090189U priority Critical patent/JPH02102727U/ja
Publication of JPH02102727U publication Critical patent/JPH02102727U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP1090189U 1989-01-31 1989-01-31 Pending JPH02102727U (US20050075337A1-20050407-C00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1090189U JPH02102727U (US20050075337A1-20050407-C00081.png) 1989-01-31 1989-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1090189U JPH02102727U (US20050075337A1-20050407-C00081.png) 1989-01-31 1989-01-31

Publications (1)

Publication Number Publication Date
JPH02102727U true JPH02102727U (US20050075337A1-20050407-C00081.png) 1990-08-15

Family

ID=31218973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1090189U Pending JPH02102727U (US20050075337A1-20050407-C00081.png) 1989-01-31 1989-01-31

Country Status (1)

Country Link
JP (1) JPH02102727U (US20050075337A1-20050407-C00081.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070100A (ja) * 2013-09-27 2015-04-13 富士電機株式会社 炭化珪素半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070100A (ja) * 2013-09-27 2015-04-13 富士電機株式会社 炭化珪素半導体装置の製造方法

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