JPH02102433U - - Google Patents

Info

Publication number
JPH02102433U
JPH02102433U JP1033889U JP1033889U JPH02102433U JP H02102433 U JPH02102433 U JP H02102433U JP 1033889 U JP1033889 U JP 1033889U JP 1033889 U JP1033889 U JP 1033889U JP H02102433 U JPH02102433 U JP H02102433U
Authority
JP
Japan
Prior art keywords
nozzle
boron nitride
crucible
wall
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1033889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1033889U priority Critical patent/JPH02102433U/ja
Publication of JPH02102433U publication Critical patent/JPH02102433U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP1033889U 1989-01-30 1989-01-30 Pending JPH02102433U (US08177716-20120515-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1033889U JPH02102433U (US08177716-20120515-C00003.png) 1989-01-30 1989-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1033889U JPH02102433U (US08177716-20120515-C00003.png) 1989-01-30 1989-01-30

Publications (1)

Publication Number Publication Date
JPH02102433U true JPH02102433U (US08177716-20120515-C00003.png) 1990-08-15

Family

ID=31217911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1033889U Pending JPH02102433U (US08177716-20120515-C00003.png) 1989-01-30 1989-01-30

Country Status (1)

Country Link
JP (1) JPH02102433U (US08177716-20120515-C00003.png)

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