JPH0199473U - - Google Patents

Info

Publication number
JPH0199473U
JPH0199473U JP19496387U JP19496387U JPH0199473U JP H0199473 U JPH0199473 U JP H0199473U JP 19496387 U JP19496387 U JP 19496387U JP 19496387 U JP19496387 U JP 19496387U JP H0199473 U JPH0199473 U JP H0199473U
Authority
JP
Japan
Prior art keywords
power source
substance
substrate
coating
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19496387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614829Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987194963U priority Critical patent/JPH0614829Y2/ja
Publication of JPH0199473U publication Critical patent/JPH0199473U/ja
Application granted granted Critical
Publication of JPH0614829Y2 publication Critical patent/JPH0614829Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1987194963U 1987-12-23 1987-12-23 薄膜の形成装置 Expired - Lifetime JPH0614829Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987194963U JPH0614829Y2 (ja) 1987-12-23 1987-12-23 薄膜の形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987194963U JPH0614829Y2 (ja) 1987-12-23 1987-12-23 薄膜の形成装置

Publications (2)

Publication Number Publication Date
JPH0199473U true JPH0199473U (forum.php) 1989-07-04
JPH0614829Y2 JPH0614829Y2 (ja) 1994-04-20

Family

ID=31485662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987194963U Expired - Lifetime JPH0614829Y2 (ja) 1987-12-23 1987-12-23 薄膜の形成装置

Country Status (1)

Country Link
JP (1) JPH0614829Y2 (forum.php)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH041649A (ja) * 1990-04-19 1992-01-07 Fuji Photo Film Co Ltd 感光性印刷版の製造方法
JPH0446342A (ja) * 1990-06-14 1992-02-17 Fuji Photo Film Co Ltd 感光性印刷版の製造方法
JP2007142234A (ja) * 2005-11-21 2007-06-07 Tokyo Electron Ltd 塗布膜の成膜方法及びその装置
JP2015013244A (ja) * 2013-07-04 2015-01-22 カルソニックカンセイ株式会社 成膜装置及び成膜方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731962U (forum.php) * 1980-07-31 1982-02-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731962U (forum.php) * 1980-07-31 1982-02-19

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH041649A (ja) * 1990-04-19 1992-01-07 Fuji Photo Film Co Ltd 感光性印刷版の製造方法
JPH0446342A (ja) * 1990-06-14 1992-02-17 Fuji Photo Film Co Ltd 感光性印刷版の製造方法
JP2007142234A (ja) * 2005-11-21 2007-06-07 Tokyo Electron Ltd 塗布膜の成膜方法及びその装置
JP2015013244A (ja) * 2013-07-04 2015-01-22 カルソニックカンセイ株式会社 成膜装置及び成膜方法

Also Published As

Publication number Publication date
JPH0614829Y2 (ja) 1994-04-20

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