JPH0199099U - - Google Patents

Info

Publication number
JPH0199099U
JPH0199099U JP19550287U JP19550287U JPH0199099U JP H0199099 U JPH0199099 U JP H0199099U JP 19550287 U JP19550287 U JP 19550287U JP 19550287 U JP19550287 U JP 19550287U JP H0199099 U JPH0199099 U JP H0199099U
Authority
JP
Japan
Prior art keywords
electron beam
shutter
divided
opening
irradiation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19550287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19550287U priority Critical patent/JPH0199099U/ja
Publication of JPH0199099U publication Critical patent/JPH0199099U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP19550287U 1987-12-22 1987-12-22 Pending JPH0199099U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19550287U JPH0199099U (US06589383-20030708-C00041.png) 1987-12-22 1987-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19550287U JPH0199099U (US06589383-20030708-C00041.png) 1987-12-22 1987-12-22

Publications (1)

Publication Number Publication Date
JPH0199099U true JPH0199099U (US06589383-20030708-C00041.png) 1989-07-03

Family

ID=31486175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19550287U Pending JPH0199099U (US06589383-20030708-C00041.png) 1987-12-22 1987-12-22

Country Status (1)

Country Link
JP (1) JPH0199099U (US06589383-20030708-C00041.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954199A (ja) * 1982-09-22 1984-03-28 株式会社東芝 中性粒子入射装置
JPS6235639A (ja) * 1985-08-09 1987-02-16 Nippon Kogaku Kk <Nikon> アライメント装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954199A (ja) * 1982-09-22 1984-03-28 株式会社東芝 中性粒子入射装置
JPS6235639A (ja) * 1985-08-09 1987-02-16 Nippon Kogaku Kk <Nikon> アライメント装置

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