JPH0197555U - - Google Patents

Info

Publication number
JPH0197555U
JPH0197555U JP19431587U JP19431587U JPH0197555U JP H0197555 U JPH0197555 U JP H0197555U JP 19431587 U JP19431587 U JP 19431587U JP 19431587 U JP19431587 U JP 19431587U JP H0197555 U JPH0197555 U JP H0197555U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
substrate storage
storage box
external frame
clean air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19431587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19431587U priority Critical patent/JPH0197555U/ja
Publication of JPH0197555U publication Critical patent/JPH0197555U/ja
Pending legal-status Critical Current

Links

JP19431587U 1987-12-21 1987-12-21 Pending JPH0197555U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19431587U JPH0197555U (US20090163788A1-20090625-C00002.png) 1987-12-21 1987-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19431587U JPH0197555U (US20090163788A1-20090625-C00002.png) 1987-12-21 1987-12-21

Publications (1)

Publication Number Publication Date
JPH0197555U true JPH0197555U (US20090163788A1-20090625-C00002.png) 1989-06-29

Family

ID=31485047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19431587U Pending JPH0197555U (US20090163788A1-20090625-C00002.png) 1987-12-21 1987-12-21

Country Status (1)

Country Link
JP (1) JPH0197555U (US20090163788A1-20090625-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013125957A (ja) * 2011-12-16 2013-06-24 Mitsubishi Electric Corp ウエハ冷却保管庫
JP2013187264A (ja) * 2012-03-06 2013-09-19 Shin Etsu Polymer Co Ltd 基板収納容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013125957A (ja) * 2011-12-16 2013-06-24 Mitsubishi Electric Corp ウエハ冷却保管庫
JP2013187264A (ja) * 2012-03-06 2013-09-19 Shin Etsu Polymer Co Ltd 基板収納容器

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