JPH0195604U - - Google Patents

Info

Publication number

JPH0195604U

JPH0195604U JP19131787U JP19131787U JPH0195604U JP H0195604 U JPH0195604 U JP H0195604U JP 19131787 U JP19131787 U JP 19131787U JP 19131787 U JP19131787 U JP 19131787U JP H0195604 U JPH0195604 U JP H0195604U

Authority

JP

Japan

Prior art keywords

optical system

interference method

measuring

fringe scanning

surface shape

Prior art date

1987-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000034 method Methods 0.000 claims description 4
• 238000005259 measurement Methods 0.000 claims description 3
• 238000010008 shearing Methods 0.000 claims description 2
• 230000003287 optical effect Effects 0.000 claims 8
• 238000010586 diagram Methods 0.000 description 4
• 238000003384 imaging method Methods 0.000 description 1

Cited By (1)