JPH0191829U - - Google Patents

Info

Publication number
JPH0191829U
JPH0191829U JP18647587U JP18647587U JPH0191829U JP H0191829 U JPH0191829 U JP H0191829U JP 18647587 U JP18647587 U JP 18647587U JP 18647587 U JP18647587 U JP 18647587U JP H0191829 U JPH0191829 U JP H0191829U
Authority
JP
Japan
Prior art keywords
hepa
clean booth
fan
utility
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18647587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18647587U priority Critical patent/JPH0191829U/ja
Publication of JPH0191829U publication Critical patent/JPH0191829U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
JP18647587U 1987-12-08 1987-12-08 Pending JPH0191829U (US06229276-20010508-P00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18647587U JPH0191829U (US06229276-20010508-P00022.png) 1987-12-08 1987-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18647587U JPH0191829U (US06229276-20010508-P00022.png) 1987-12-08 1987-12-08

Publications (1)

Publication Number Publication Date
JPH0191829U true JPH0191829U (US06229276-20010508-P00022.png) 1989-06-16

Family

ID=31477701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18647587U Pending JPH0191829U (US06229276-20010508-P00022.png) 1987-12-08 1987-12-08

Country Status (1)

Country Link
JP (1) JPH0191829U (US06229276-20010508-P00022.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03264799A (ja) * 1990-03-15 1991-11-26 Taikisha Ltd ファンフィルタユニット
JP2015166646A (ja) * 2014-03-03 2015-09-24 三機工業株式会社 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03264799A (ja) * 1990-03-15 1991-11-26 Taikisha Ltd ファンフィルタユニット
JP2015166646A (ja) * 2014-03-03 2015-09-24 三機工業株式会社 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム

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