JPH0187173U - - Google Patents

Info

Publication number
JPH0187173U
JPH0187173U JP18251587U JP18251587U JPH0187173U JP H0187173 U JPH0187173 U JP H0187173U JP 18251587 U JP18251587 U JP 18251587U JP 18251587 U JP18251587 U JP 18251587U JP H0187173 U JPH0187173 U JP H0187173U
Authority
JP
Japan
Prior art keywords
growth
vapor phase
opening
substrates
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18251587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527503Y2 (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987182515U priority Critical patent/JPH0527503Y2/ja
Publication of JPH0187173U publication Critical patent/JPH0187173U/ja
Application granted granted Critical
Publication of JPH0527503Y2 publication Critical patent/JPH0527503Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987182515U 1987-11-30 1987-11-30 Expired - Lifetime JPH0527503Y2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987182515U JPH0527503Y2 (US20020051482A1-20020502-M00012.png) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987182515U JPH0527503Y2 (US20020051482A1-20020502-M00012.png) 1987-11-30 1987-11-30

Publications (2)

Publication Number Publication Date
JPH0187173U true JPH0187173U (US20020051482A1-20020502-M00012.png) 1989-06-08
JPH0527503Y2 JPH0527503Y2 (US20020051482A1-20020502-M00012.png) 1993-07-13

Family

ID=31473962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987182515U Expired - Lifetime JPH0527503Y2 (US20020051482A1-20020502-M00012.png) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0527503Y2 (US20020051482A1-20020502-M00012.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833150A (US20020051482A1-20020502-M00012.png) * 1971-08-28 1973-05-08
JPS57200291A (en) * 1981-06-01 1982-12-08 Fujitsu Ltd Vapor-phase growing method of compound semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833150A (US20020051482A1-20020502-M00012.png) * 1971-08-28 1973-05-08
JPS57200291A (en) * 1981-06-01 1982-12-08 Fujitsu Ltd Vapor-phase growing method of compound semiconductor

Also Published As

Publication number Publication date
JPH0527503Y2 (US20020051482A1-20020502-M00012.png) 1993-07-13

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