JPH0186227U - - Google Patents

Info

Publication number

JPH0186227U

JPH0186227U JP18312287U JP18312287U JPH0186227U JP H0186227 U JPH0186227 U JP H0186227U JP 18312287 U JP18312287 U JP 18312287U JP 18312287 U JP18312287 U JP 18312287U JP H0186227 U JPH0186227 U JP H0186227U

Authority

JP

Japan

Prior art keywords

raw material

blow

holes

material gas

gas

Prior art date

1987-11-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002994 raw material Substances 0.000 claims description 5
• 238000009792 diffusion process Methods 0.000 claims description 4
• 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
• 230000005495 cold plasma Effects 0.000 claims 1
• 238000000354 decomposition reaction Methods 0.000 claims 1
• 239000007787 solid Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2