JPH0186058U - - Google Patents
Info
- Publication number
- JPH0186058U JPH0186058U JP1987181438U JP18143887U JPH0186058U JP H0186058 U JPH0186058 U JP H0186058U JP 1987181438 U JP1987181438 U JP 1987181438U JP 18143887 U JP18143887 U JP 18143887U JP H0186058 U JPH0186058 U JP H0186058U
- Authority
- JP
- Japan
- Prior art keywords
- box
- ion source
- temperature sensor
- block
- ionization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181438U JPH0541495Y2 (cs) | 1987-11-28 | 1987-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181438U JPH0541495Y2 (cs) | 1987-11-28 | 1987-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0186058U true JPH0186058U (cs) | 1989-06-07 |
| JPH0541495Y2 JPH0541495Y2 (cs) | 1993-10-20 |
Family
ID=31472921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181438U Expired - Lifetime JPH0541495Y2 (cs) | 1987-11-28 | 1987-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541495Y2 (cs) |
-
1987
- 1987-11-28 JP JP1987181438U patent/JPH0541495Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0541495Y2 (cs) | 1993-10-20 |
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