JPH0184892U - - Google Patents

Info

Publication number
JPH0184892U
JPH0184892U JP1987181255U JP18125587U JPH0184892U JP H0184892 U JPH0184892 U JP H0184892U JP 1987181255 U JP1987181255 U JP 1987181255U JP 18125587 U JP18125587 U JP 18125587U JP H0184892 U JPH0184892 U JP H0184892U
Authority
JP
Japan
Prior art keywords
nozzle
substrate
optical system
dust collection
collection hood
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987181255U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987181255U priority Critical patent/JPH0184892U/ja
Publication of JPH0184892U publication Critical patent/JPH0184892U/ja
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/53Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Prevention Of Fouling (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1987181255U 1987-11-27 1987-11-27 Pending JPH0184892U (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181255U JPH0184892U (US06534493-20030318-C00166.png) 1987-11-27 1987-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181255U JPH0184892U (US06534493-20030318-C00166.png) 1987-11-27 1987-11-27

Publications (1)

Publication Number Publication Date
JPH0184892U true JPH0184892U (US06534493-20030318-C00166.png) 1989-06-06

Family

ID=31472744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181255U Pending JPH0184892U (US06534493-20030318-C00166.png) 1987-11-27 1987-11-27

Country Status (1)

Country Link
JP (1) JPH0184892U (US06534493-20030318-C00166.png)

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