JPH0184433U - - Google Patents

Info

Publication number
JPH0184433U
JPH0184433U JP1987181598U JP18159887U JPH0184433U JP H0184433 U JPH0184433 U JP H0184433U JP 1987181598 U JP1987181598 U JP 1987181598U JP 18159887 U JP18159887 U JP 18159887U JP H0184433 U JPH0184433 U JP H0184433U
Authority
JP
Japan
Prior art keywords
wafer
arm
transfer arm
transfer
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987181598U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987181598U priority Critical patent/JPH0184433U/ja
Publication of JPH0184433U publication Critical patent/JPH0184433U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP1987181598U 1987-11-26 1987-11-26 Pending JPH0184433U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181598U JPH0184433U (US06650917-20031118-M00005.png) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181598U JPH0184433U (US06650917-20031118-M00005.png) 1987-11-26 1987-11-26

Publications (1)

Publication Number Publication Date
JPH0184433U true JPH0184433U (US06650917-20031118-M00005.png) 1989-06-05

Family

ID=31473078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181598U Pending JPH0184433U (US06650917-20031118-M00005.png) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0184433U (US06650917-20031118-M00005.png)

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