JPH0183065U - - Google Patents

Info

Publication number

JPH0183065U

JPH0183065U JP1987178812U JP17881287U JPH0183065U JP H0183065 U JPH0183065 U JP H0183065U JP 1987178812 U JP1987178812 U JP 1987178812U JP 17881287 U JP17881287 U JP 17881287U JP H0183065 U JPH0183065 U JP H0183065U

Authority

JP

Japan

Prior art keywords

workpiece

gas introduction

plasma cvd

gas

exhaust port

Prior art date

1987-11-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005268 plasma chemical vapour deposition Methods 0.000 claims 3
• 238000013459 approach Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1